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DOI | 10.1016/j.seppur.2019.03.038 |
Study of the enrichment of NF3 waste gas using zeolite and polymeric membranes | |
Kim, Hyun Su; Kim, Eun Young; Lee, Pyung Soo | |
发表日期 | 2019 |
ISSN | 1383-5866 |
EISSN | 1873-3794 |
卷号 | 220页码:1-7 |
英文摘要 | A zeolite membrane and polymer membranes were prepared for the enrichment of NF3 waste gas. NF3 is a strong greenhouse gas with a 100 year global warming potential (GWP) of > 16,600, and is mostly used in the plasma enhanced chemical vapor deposition (PECVD) process as an etching and cleaning gas. First, dense polymer films using polysulfone, polyimide, AF-1600 (R), AF-2400 (R), PDMS (polymethylsiloxane), PTMSP (poly (1-trimethylsilyl-1-propyne)), and PTMSDPA (poly[1-phenyl-24p-(trimethylsilyl)phenyl]acetylene]) were prepared, and their N-2/NF3 separation performance was studied. High N-2/NF3 ideal selectivity was obtained from the polyimide and polysulfone films, but these modules were not attractive for the NF(3 )enrichment process because of their low N-2/NF3 mixture gas selectivity. SAPO-34 membranes were then prepared and applied for the NF3 enrichment process. This membrane exhibited promising separation performance (> 200 N-2/NF(3 )selectivity, > 6.7 x 10(-8 )N(2 )mol/m(2)/s/Pa) for the NF3 enrichment process. However, in order to deal with a high waste stream volume, it was necessary to greatly increase the membrane area. Potential zeolite membrane frameworks for NF3 enrichment have been proposed through membrane-based system design. |
WOS研究方向 | Engineering |
来源期刊 | SEPARATION AND PURIFICATION TECHNOLOGY
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文献类型 | 期刊论文 |
条目标识符 | http://gcip.llas.ac.cn/handle/2XKMVOVA/89784 |
作者单位 | Chung Ang Univ, Dept Chem Engn & Mat Sci, 84 Heukseok Ro, Seoul 06974, South Korea |
推荐引用方式 GB/T 7714 | Kim, Hyun Su,Kim, Eun Young,Lee, Pyung Soo. Study of the enrichment of NF3 waste gas using zeolite and polymeric membranes[J],2019,220:1-7. |
APA | Kim, Hyun Su,Kim, Eun Young,&Lee, Pyung Soo.(2019).Study of the enrichment of NF3 waste gas using zeolite and polymeric membranes.SEPARATION AND PURIFICATION TECHNOLOGY,220,1-7. |
MLA | Kim, Hyun Su,et al."Study of the enrichment of NF3 waste gas using zeolite and polymeric membranes".SEPARATION AND PURIFICATION TECHNOLOGY 220(2019):1-7. |
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