Climate Change Data Portal
| DOI | 10.1109/JSEN.2021.3128534 |
| Noise Analysis and Performance Improvement of a MEMS Fabry-Perot Seismic Accelerometer | |
| Zhao, Minghui; Qi, Yonghong; Zhang, Xiaopeng; Li, Bo; Jiang, Zhuangde; Wei, Xueyong | |
| 通讯作者 | Wei, XY (通讯作者)，Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China. |
| 发表日期 | 2022 |
| ISSN | 1530-437X |
| EISSN | 1558-1748 |
| 起始页码 | 365 |
| 结束页码 | 372 |
| 卷号 | 22期号:1 |
| 英文摘要 | MEMS accelerometers based on the optical interference technique play an important role in seismic wave detection due to their high resolution, strong electromagnetic stability, and low cost. This paper reports a MEMS Fabry-Perot seismic accelerometer. The working principle and transfer function were established to introduce the accelerometer. Noise sources that contribute to the output of the accelerometer were analyzed and predicted. To improve the performance of the accelerometer, the active temperature compensation, the appropriate laser driving current selection, and the laser modulation-demodulation technologies were adopted to reduce the noise. Experimental results show that the noise floor of the accelerometer was decreased from 11 mu g/root Hz@1 Hz to 330 ng/root Hz@1 Hz. |
| 关键词 | INTERFEROMETERSEISMOMETERINTENSITYSILICON |
| 英文关键词 | MEMS seismic accelerometer; Fabry-Perot interference; noise equivalent acceleration |
| 语种 | 英语 |
| WOS研究方向 | Engineering ; Instruments & Instrumentation ; Physics |
| WOS类目 | Engineering, Electrical & Electronic ; Instruments & Instrumentation ; Physics, Applied |
| WOS记录号 | WOS:000735528200047 |
| 来源期刊 | IEEE SENSORS JOURNAL
 |
| 来源机构 | 中国科学院西北生态环境资源研究院 |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://gcip.llas.ac.cn/handle/2XKMVOVA/254608 |
| 作者单位 | [Zhao, Minghui; Qi, Yonghong; Zhang, Xiaopeng; Li, Bo; Jiang, Zhuangde; Wei, Xueyong] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China; [Zhang, Xiaopeng] Northwest Inst Nucl Technol, Xian 710024, Peoples R China; [Wei, Xueyong] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, State Key Lab Appl Opt, Changchun 130033, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhao, Minghui,Qi, Yonghong,Zhang, Xiaopeng,et al. Noise Analysis and Performance Improvement of a MEMS Fabry-Perot Seismic Accelerometer[J]. 中国科学院西北生态环境资源研究院,2022,22(1). |
| APA | Zhao, Minghui,Qi, Yonghong,Zhang, Xiaopeng,Li, Bo,Jiang, Zhuangde,&Wei, Xueyong.(2022).Noise Analysis and Performance Improvement of a MEMS Fabry-Perot Seismic Accelerometer.IEEE SENSORS JOURNAL,22(1). |
| MLA | Zhao, Minghui,et al."Noise Analysis and Performance Improvement of a MEMS Fabry-Perot Seismic Accelerometer".IEEE SENSORS JOURNAL 22.1(2022). |
| 条目包含的文件 | 条目无相关文件。 | |||||
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。
