气候变化领域集成服务门户(CCPortal): Self-oriented regular arrays of carbon nanotubes and their field emission properties

CCPortal

DOI	10.1126/science.283.5401.512
	Self-oriented regular arrays of carbon nanotubes and their field emission properties
	Fan S.; Chapline M.G.; Franklin N.R.; Tombler T.W.; Cassell A.M.; Dai H.
发表日期	1999
ISSN	0036-8075
起始页码	512
结束页码	514
卷号	283 期号:5401
英文摘要	The synthesis of massive arrays of monodispersed carbon nanotubes that are self-oriented on patterned porous silicon and plain silicon substrates is reported. The approach involves chemical vapor deposition, catalytic particle size control by substrate design, nanotube positioning by patterning, and nanotube self-assembly for orientation. The mechanisms of nanotube growth and self-orientation are elucidated. The well-ordered nanotubes can be used as electron field emission arrays. Scaling up of the synthesis process should be entirely compatible with the existing semiconductor processes, and should allow the development of nanotube devices integrated into silicon technology.The synthesis of massive arrays of monodispersed carbon nanotubes that are self-oriented on patterned porous silicon and plain silicon substrates is reported. The approach involves chemical vapor deposition, catalytic particle size control by substrate design, nanotube positioning by patterning, and nanotube self-assembly for orientation. The mechanisms of nanotube growth and self-orientation are elucidated. The well-ordered nanotubes can be used as electron field emission arrays. Scaling up of the synthesis process should be entirely compatible with the existing semiconductor processes, and should allow the development of nanotube devices integrated into silicon technology.
英文关键词	Carbon; Chemical vapor deposition; Crystal growth; Particle size analysis; Semiconductor device manufacture; Silicon; Synthesis (chemical); Transmission electron microscopy; Catalytic particle size control; Electron field emission arrays; Monodispersed carbon nanotubes; Nanotubes; nanoparticle; silicon; article; catalysis; device; dispersion; electron beam; orientation; priority journal; semiconductor
语种	英语
来源期刊	Science
文献类型	期刊论文
条目标识符	http://gcip.llas.ac.cn/handle/2XKMVOVA/243659
作者单位	Department of Chemistry, Stanford University, Stanford, CA 94305, United States
推荐引用方式 GB/T 7714	Fan S.,Chapline M.G.,Franklin N.R.,et al. Self-oriented regular arrays of carbon nanotubes and their field emission properties[J],1999,283(5401).
APA	Fan S.,Chapline M.G.,Franklin N.R.,Tombler T.W.,Cassell A.M.,&Dai H..(1999).Self-oriented regular arrays of carbon nanotubes and their field emission properties.Science,283(5401).
MLA	Fan S.,et al."Self-oriented regular arrays of carbon nanotubes and their field emission properties".Science 283.5401(1999).