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DOI	10.1126/science.aba5980
	Aligned, high-density semiconducting carbon nanotube arrays for high-performance electronics
	Liu L.; Han J.; Xu L.; Zhou J.; Zhao C.; Ding S.; Shi H.; Xiao M.; Ding L.; Ma Z.; Jin C.; Zhang Z.; Peng L.-M.
发表日期	2020
ISSN	0036-8075
起始页码	850
结束页码	856
卷号	368 期号:6493
英文摘要	Single-walled carbon nanotubes (CNTs) may enable the fabrication of integrated circuits smaller than 10 nanometers, but this would require scalable production of dense and electronically pure semiconducting nanotube arrays on wafers. We developed a multiple dispersion and sorting process that resulted in extremely high semiconducting purity and a dimension-limited self-alignment (DLSA) procedure for preparing well-aligned CNT arrays (within alignment of 9 degrees) with a tunable density of 100 to 200 CNTs per micrometer on a 10-centimeter silicon wafer. Top-gate field-effect transistors (FETs) fabricated on the CNT array show better performance than that of commercial silicon metal oxide–semiconductor FETs with similar gate length, in particular an on-state current of 1.3 milliamperes per micrometer and a recorded transconductance of 0.9 millisiemens per micrometer for a power supply of 1 volt, while maintaining a low room-temperature subthreshold swing of <90 millivolts per decade using an ionic-liquid gate. Batch-fabricated top-gate five-stage ring oscillators exhibited a highest maximum oscillating frequency of >8 gigahertz. Copyright © 2020 The Authors,
关键词	array carbon nanotube electronic commerce electronic equipment nanotube performance assessment silicon superconductivity
语种	英语
来源机构	Science
文献类型	期刊论文
条目标识符	http://gcip.llas.ac.cn/handle/2XKMVOVA/133488
推荐引用方式 GB/T 7714	Liu L.,Han J.,Xu L.,et al. Aligned, high-density semiconducting carbon nanotube arrays for high-performance electronics[J]. Science,2020,368(6493).
APA	Liu L..,Han J..,Xu L..,Zhou J..,Zhao C..,...&Peng L.-M..(2020).Aligned, high-density semiconducting carbon nanotube arrays for high-performance electronics.,368(6493).
MLA	Liu L.,et al."Aligned, high-density semiconducting carbon nanotube arrays for high-performance electronics".368.6493(2020).