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DOI10.3390/app9030385
O-Band and C/L-Band III-V Quantum Dot Lasers Monolithically Grown on Ge and Si Substrate
Feng, Qi; Wei, Wenqi; Zhang, Bin; Wang, Hailing; Wang, Jianhuan; Cong, Hui; Wang, Ting; Zhang, Jianjun
发表日期2019
EISSN2076-3417
卷号9期号:3
英文摘要Direct epitaxial growth of III-V heterostructure on CMOS-compatible silicon wafer offers substantial manufacturing cost and scalability advantages. Quantum dot (QD) devices are less sensitive to defect and temperature, which makes epitaxially grown III-V QD lasers on Si one of the most promising technologies for achieving low-cost, scalable integration with silicon photonics. The major challenges are that heteroepitaxial growth of III-V materials on Si normally encounters high densities of mismatch dislocations, antiphase boundaries and thermal cracks, which limit the device performance and lifetime. This paper reviews some of the recent developments on hybrid InAs/GaAs QD growth on Ge substrates and highly uniform (111)-faceted hollow Si (001) substrates by molecular beam epitaxy (MBE). By implementing step-graded epitaxial growth techniques, the emission wavelength can be tuned into either an O band or C/L band. Furthermore, microcavity QD laser devices are fabricated and characterized. The epitaxially grown III-V/IV hybrid platform paves the way to provide a promising approach for future on-chip silicon photonic integration.
关键词III-V quantum dotsilicon photonicsepitaxial growth
学科领域Chemistry; Materials Science; Physics
语种英语
WOS研究方向Chemistry, Multidisciplinary ; Materials Science, Multidisciplinary ; Physics, Applied
来源期刊APPLIED SCIENCES-BASEL
来源机构中国科学院西北生态环境资源研究院
文献类型期刊论文
条目标识符http://gcip.llas.ac.cn/handle/2XKMVOVA/112093
作者单位Chinese Acad Sci, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China
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GB/T 7714
Feng, Qi,Wei, Wenqi,Zhang, Bin,et al. O-Band and C/L-Band III-V Quantum Dot Lasers Monolithically Grown on Ge and Si Substrate[J]. 中国科学院西北生态环境资源研究院,2019,9(3).
APA Feng, Qi.,Wei, Wenqi.,Zhang, Bin.,Wang, Hailing.,Wang, Jianhuan.,...&Zhang, Jianjun.(2019).O-Band and C/L-Band III-V Quantum Dot Lasers Monolithically Grown on Ge and Si Substrate.APPLIED SCIENCES-BASEL,9(3).
MLA Feng, Qi,et al."O-Band and C/L-Band III-V Quantum Dot Lasers Monolithically Grown on Ge and Si Substrate".APPLIED SCIENCES-BASEL 9.3(2019).
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